FITI GROUP
Core Technology

Machining

Technical Introduction

By controlling the process and drilling tools, the hole dimensions, geometry, and internal surface finish can be controled to meet diverse application requirements.

Technical Features

‧ Minimum hole diameter: 0.012inch

‧ Hole diameter tolerance: ±0.0005inch

‧ Coaxiality: 0.001inch

‧ Roundess: 0.0008inch

‧ Hole configuration:four-stage holes

‧ Internal surface Ra<0.4μm

‧ Maximum aspect ratio: 40

Applications

Used in thin film deposition, etching and cleaning processes.

Technical Introduction

The manufacturing technology for complex structure part is for irregularly shape part with multi-layer structures, complex water/gas channels, and large-sized chamber, getting high quality surface and high precision machining by advanced machining processes.

Technical Features

‧ Maximum size: 6000x4000x1400mm

‧ Position: 0.05mm

‧ Adaptor machining:Maximum extension depth:200 mm,Maximum tool diameter:25mm,Accuracy:0.02mm

Applications

Used in transfer chambers, process chambers, etc.

Extrude Hone

‧ Media Cylinder: 305 mm

‧ Media Flow Rate: 129L/Min

‧ Media Pressure: Min. 155/ Max. 800 psi

Roller Burnishing

‧ Toughness improvement: 15~30%

‧ Surface Finish ≤ Ra 8

‧ Roller Spec: D .44 inch Max

Bending

‧ Characteristic: 8-axis CNC、Push bending/ stretch bending 3D forming

‧ Precision: Feeding Precision±0.1mm、Bending Precision±0.1

‧ Bend Ovality < 10%

‧ Minimum bending diameter: 1.5D

T-Pulling

‧ Applicable to many different materials such as Stainless Steel and Copper

‧ Process Flow: Oval hole preparation ->T pull ->Allowance removal ->Electropolishing

‧ Wall Thining Rate < 17%