Technical Introduction
By controlling the process and drilling tools, the hole dimensions, geometry, and internal surface finish can be controled to meet diverse application requirements.
Technical Features
‧ Minimum hole diameter: 0.012inch
‧ Hole diameter tolerance: ±0.0005inch
‧ Coaxiality: 0.001inch
‧ Roundess: 0.0008inch
‧ Hole configuration:four-stage holes
‧ Internal surface Ra<0.4μm
‧ Maximum aspect ratio: 40
Applications
Used in thin film deposition, etching and cleaning processes.