Flexible to meet and exceed customers' diversified demands, providing solutions from product development to mass production. Professional manufacturing team to provide customers with continuous optimization of vertical integrated manufacturing services.
High-Cleanliness Precision Mechanical Assembly Technology
- Key Capabilities：
‧ Precision Electro-Mechanical Alignment and Positioning, Torque Control
‧ Assembly of Large Chamber / Frame Structures
‧ Semiconductor-Grade Clean Assembly Environment
Vacuum Systems and Sealing Assembly Technology
‧ High vacuum / ultra-high vacuum (HV/UHV) module assembly
‧ Vacuum testing capability: Helium leak test~10⁻¹⁰ atm·cc/s ; ROR(Rate of Rise)~0.05 mtorr/min
Electrical and Control System Assembly and Testing
‧ Structural components and drive system integration
‧ Controller and sensor system collaboration
‧ Electrical testing / Interlocking testing / Signal testing/IR Testing
System/Sub-system Assembly and Testing
‧ Wafer Detects
‧ Motion control test
‧ Epi Thickness & Composition
‧ Robot Arm Testing & Calibration
‧ Cycle Test